T 0389/94 (Dry etching method/KABUSHIKI KAISHA TOSHIBA) of 27.11.1998

European Case Law Identifier:

ECLI:EP:BA:1998:T038994.19981127

Date of decision:

27 November 1998

Case number:

T 0389/94

Application number:

88105176.7

IPC class:

H01L 21/306

Language of proceedings:

Distribution:

Download and more information:

Decision text in EN (PDF, 181Â KB)
Documentation of the appeal procedure can be found in the Register
Bibliographic information is available in:	EN
Versions:	Unpublished

Title of application:

Dry etching method

Applicant name:

KABUSHIKI KAISHA TOSHIBA

Opponent name:

Board:

3.4.01

Headnote:

Relevant legal provisions:

European Patent Convention 1973 Art 111(1)
European Patent Convention 1973 Art 114(1)

Keywords:

Prior art documents introduced ex-officio by the Board
Claims substantially amended in the appeal procedure
Remittal of the case to the examining division for further prosecution

Catchwords:

Cited decisions:

T 0028/81
T 0063/86
T 0047/90
T 0837/91
T 1016/96

Citing decisions:

Source: http://www.epo.org/law-practice/case-law-appeals/recent/t940389eu1.html

Date retrieved: 17 May 2021