| European Case Law Identifier: |
ECLI:EP:BA:2002:T120001.20021106 |
| Date of decision: |
06 November 2002 |
| Case number: |
T 1200/01 |
| Application number: |
95103767.0 |
| IPC class: |
H01J 37/32 |
| Language of proceedings: |
EN |
| Distribution: |
B |
| Download and more information: |
|
| Title of application: |
Plasma processing chamber and method of treating substrates in a plasma processing chamber |
| Applicant name: |
Applied Materials, Inc. |
| Opponent name: |
Institute of Technological Information, Inc. |
| Board: |
3.5.02 |
| Headnote: |
- |
| Relevant legal provisions: |
|
| Keywords: |
Opposition deemed to have been filed (no)
Free evaluation of evidence; concept of filing |
| Catchwords: |
-
|
| Cited decisions: |
|
| Citing decisions: |
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14 references found.
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Offical Journal of the EPO
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Case Law Book: III Amendments
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Case Law of the Enlarged Board
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General Case Law
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