T 0892/05 () of 17.10.2007

European Case Law Identifier: ECLI:EP:BA:2007:T089205.20071017
Date of decision: 17 October 2007
Case number: T 0892/05
Application number: 02258293.6
IPC class: G03F 7/20
Language of proceedings: EN
Distribution: D
Download and more information:
Decision text in EN (PDF, 38 KB)
Documentation of the appeal procedure can be found in the Register
Bibliographic information is available in: EN
Versions: Unpublished
Title of application: Lithographic apparatus, device manufacturing method, and method of manufacturing an optical element
Applicant name: ASML Netherlands B.V.
Opponent name: -
Board: 3.4.03
Headnote: -
Relevant legal provisions:
European Patent Convention 1973 Art 54
Keywords: Novelty (yes)
Inventive step (yes)
Catchwords:

-

Cited decisions:
T 0943/93
T 0464/94
Citing decisions:
-

3 references found.

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