European Case Law Identifier: |
ECLI:EP:BA:2007:T089205.20071017 |
Date of decision: |
17 October 2007 |
Case number: |
T 0892/05 |
Application number: |
02258293.6 |
IPC class: |
G03F 7/20 |
Language of proceedings: |
EN |
Distribution: |
D |
Download and more information: |
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Title of application: |
Lithographic apparatus, device manufacturing method, and method of manufacturing an optical element |
Applicant name: |
ASML Netherlands B.V. |
Opponent name: |
- |
Board: |
3.4.03 |
Headnote: |
- |
Relevant legal provisions: |
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Keywords: |
Novelty (yes)
Inventive step (yes) |
Catchwords: |
-
|
Cited decisions: |
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Citing decisions: |
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3 references found.
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Case Law Book: I Patentability
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