T 0883/07 () of 22.11.2007

European Case Law Identifier: ECLI:EP:BA:2007:T088307.20071122
Date of decision: 22 November 2007
Case number: T 0883/07
Application number: 00926042.3
IPC class: H01L 21/66
Language of proceedings: EN
Distribution: D
Download and more information:
Decision text in EN (PDF, 29 KB)
Documentation of the appeal procedure can be found in the Register
Bibliographic information is available in: EN
Versions: Unpublished
Title of application: Method and apparatus for run-to-run controlling of overlay registration
Applicant name: ADVANCED MICRO DEVICES, INC.
Opponent name: -
Board: 3.4.03
Headnote: -
Relevant legal provisions:
European Patent Convention 1973 Art 82
European Patent Convention 1973 R 67
Keywords: Unity of invention
Reimbursement of appeal fee (yes)
Catchwords:

-

Cited decisions:
G 0002/92
Citing decisions:
-

3 references found.

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Case Law Book: III Amendments

Case Law Book: V Priority

Case Law of the Enlarged Board