European Case Law Identifier: |
ECLI:EP:BA:2007:T088307.20071122 |
Date of decision: |
22 November 2007 |
Case number: |
T 0883/07 |
Application number: |
00926042.3 |
IPC class: |
H01L 21/66 |
Language of proceedings: |
EN |
Distribution: |
D |
Download and more information: |
|
Title of application: |
Method and apparatus for run-to-run controlling of overlay registration |
Applicant name: |
ADVANCED MICRO DEVICES, INC. |
Opponent name: |
- |
Board: |
3.4.03 |
Headnote: |
- |
Relevant legal provisions: |
|
Keywords: |
Unity of invention
Reimbursement of appeal fee (yes) |
Catchwords: |
-
|
Cited decisions: |
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Citing decisions: |
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3 references found.
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Case Law Book: III Amendments
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Case Law Book: V Priority
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Case Law of the Enlarged Board
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