European Case Law Identifier: |
ECLI:EP:BA:2003:T080100.20030625 |
Date of decision: |
25 June 2003 |
Case number: |
T 0801/00 |
Application number: |
91110658.1 |
IPC class: |
G01N 23/223 |
Language of proceedings: |
EN |
Distribution: |
C |
Download and more information: |
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Title of application: |
System for analyzing metal impurity on the surface of a single crystal semiconductor by using total reflection of x-rays fluorescence |
Applicant name: |
KABUSHIKI KAISHA TOSHIBA |
Opponent name: |
GKSS-Forschungszentrum Geesthacht GmbH |
Board: |
3.4.02 |
Headnote: |
- |
Relevant legal provisions: |
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Keywords: |
Admissibilty of the appeal (yes)
Late filed documents (not admitted) |
Catchwords: |
-
|
Cited decisions: |
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Citing decisions: |
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