| European Case Law Identifier: |
ECLI:EP:BA:2003:T080100.20030625 |
| Date of decision: |
25 June 2003 |
| Case number: |
T 0801/00 |
| Application number: |
91110658.1 |
| IPC class: |
G01N 23/223 |
| Language of proceedings: |
EN |
| Distribution: |
C |
| Download and more information: |
|
| Title of application: |
System for analyzing metal impurity on the surface of a single crystal semiconductor by using total reflection of x-rays fluorescence |
| Applicant name: |
KABUSHIKI KAISHA TOSHIBA |
| Opponent name: |
GKSS-Forschungszentrum Geesthacht GmbH |
| Board: |
3.4.02 |
| Headnote: |
- |
| Relevant legal provisions: |
|
| Keywords: |
Admissibilty of the appeal (yes)
Late filed documents (not admitted) |
| Catchwords: |
-
|
| Cited decisions: |
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| Citing decisions: |
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