T 0710/99 () of 11.2.2003

European Case Law Identifier: ECLI:EP:BA:2003:T071099.20030211
Date of decision: 11 February 2003
Case number: T 0710/99
Application number: 90109477.1
IPC class: H01L 21/00
Language of proceedings: EN
Distribution: C
Download and more information:
Decision text in EN (PDF, 71 KB)
Documentation of the appeal procedure can be found in the Register
Bibliographic information is available in: EN
Versions: Unpublished
Title of application: Multiple chamber staged-vacuum semiconductor wafer processing system
Applicant name: APPLIED MATERIALS
Opponent name: Institute of Technological Information, Inc.
Board: 3.4.03
Headnote: -
Relevant legal provisions:
European Patent Convention 1973 Art 56
Keywords: New requests filed during the oral proceedings before the Board - admitted (see point 2.4 of the "Reasons for the Decision")
Catchwords:

-

Cited decisions:
T 0095/83
T 0482/89
T 0231/95
T 1148/97
Citing decisions:
-

Source: http://www.epo.org/law-practice/case-law-appeals/recent/t990710eu1.html

Date retrieved: 17 May 2021

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