| European Case Law Identifier: |
ECLI:EP:BA:2007:T088307.20071122 |
| Date of decision: |
22 November 2007 |
| Case number: |
T 0883/07 |
| Application number: |
00926042.3 |
| IPC class: |
H01L 21/66 |
| Language of proceedings: |
EN |
| Distribution: |
D |
| Download and more information: |
|
| Title of application: |
Method and apparatus for run-to-run controlling of overlay registration |
| Applicant name: |
ADVANCED MICRO DEVICES, INC. |
| Opponent name: |
- |
| Board: |
3.4.03 |
| Headnote: |
- |
| Relevant legal provisions: |
|
| Keywords: |
Unity of invention
Reimbursement of appeal fee (yes) |
| Catchwords: |
-
|
| Cited decisions: |
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| Citing decisions: |
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3 references found.
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Case Law Book: III Amendments
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Case Law Book: V Priority
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Case Law of the Enlarged Board
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